Vertical Replacement-Gate (VRG) Transistors

(by Jack Hergenrother and Don Monroe at Bell Labs)

J.M. Hergenrother, Don Monroe et al., IEEE IEDM 1999

S.-H. Oh, J.M. Hergenrother et al., IEEE IEDM 2000

S.-H. Oh, J.M. Hergenrother et al. IEEE IEDM 2000Paper.html

Scanning capacitance microscopy (p-type transistor)

Selective Epitaxial Growth of Silicon

Laboratory of

Nanostructures and Biosensing